FilmSense FS-8 Multiwavelength ellipsometer

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Product Introduction of FilmSense FS-8 Multi-Wavelength Ellipsometer

The fourth generationFilmSense FS-8 Multiwavelength ellipsometer"UseLong-lifeLEDLight sourceandNo moving partsAn ellipsometer detector. Provide fast and reliable thin film measurement in a portable compact system. Through a simple1Second measurement can determine the film thickness and refractive index of most transparent films with very high precision and accuracy, and conduct tests on samplesOptical constantn& kvalueMeasurement of the properties of such thin films.

Product features and advantages of FilmSense FS-8 multi-wavelength ellipsometer

"MultipleLEDLight source4or8One, wavelength370-950nmIt depends on the system
Integrated design: There are no moving parts in the ellipsometric detector
Long lifespan of the light source> 50000There is no time-consuming alignment orPMProgram
Fast measurement speed10msMulti-wavelength data within
Simple to use and maintain: The software interface can be accessed directly with a browser. There is no need for complex software or maintenance, and no external electronic device box or optical fiber connection is required.

Measurement principle of FilmSense FS-8 multi-wavelength ellipsometer product:

FilmSense FS-8 multi-wavelengthEllipsometerIt is a non-contact measurement method for film thickness measurement that utilizes the optical properties of thin films. The thickness and refractive index of the film are measured based on the state changes of polarized light during reflection or transmission. When polarized light shines on the surface of a film, the polarization state of the reflected or transmitted light will change. This change depends on the thickness of the film, its refractive index, as well as the polarization state and Angle of the incident light. By analyzing these changes, the thickness of the film can be accurately deduced.

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Production capacity and performance of FilmSense FS-8 multi-wavelength ellipsometer

FilmSense FS-8 Multiwavelength ellipsometerIt performs well in measuring the thickness and refractive index of transparent single-layer films. The upper limit thickness depends on the ellipsometer system (usually)2-5mumIt also depends on the optical constants of the substrate and the film. Like other ellipsometer systems, to obtain accurate refractive index measurement results, a relatively small film thickness is required (usually)10nm"

It is also possible to measure light-absorbing films, but since the optical constant of the film is requirednandkData analysis has become more complex.FilmSenseThe software contains multiple determinationsn& kThe method value of the value:

Multi-sample analysis
Combine ellipsometer and transmittance measurement;
Immersion ellipsometer with the new liquid sample cell option;
Dispersed model. The upper limit of the thickness of the absorption film is closely related to the type of material. For metal films, the upper limit is usually50Nanometer.
FilmSense FS-8 Multi-wavelength ellipsometers can also be used to measure multilayer film laminates (sometimes up to.5It depends on the thickness and refractive index of each layer. You can do it atFilmSenseSimulations are conducted in the software to determine whether a specific sample structure is feasible. For some samples, the surface roughness and refractive index gradient in the film can also be characterized.